Omron Electronics D6F series MEMS Flow Sensors and Velocity Sensors are compact, highly reliable sensors with a unique cyclone flow structure that diverts particulate from the sensor element. As an alternative to differential pressure sensing or for detecting clogged filters, the D6F series is available in PCB-mounted, flange-mount, and connector models. The D6F-P 0.1 LPM version MEMS Flow Sensor is targeted at ultra low-flow applications and measures up to 200 LPM with a bypass set-up.