These high-performance silicon micromachined linear accelerometersand inclinometers consist of a sensor element and an ASIC packaged in a3x5x0.9mm Land Grid Array (LGA). The sensor element is fabricated fromsingle-crystal silicon with proprietary Deep Reactive Ion Etching(DRIE) processes and is protected from the environment by ahermetically-sealed silicon cap at the wafer level.\tTheKXPS5 series is designed to provide a high signal-to-noise ratio withexcellent performance over temperature. These sensors can accept supplyvoltages between 1.8V and 5.25V. Sensitivity is factory programmableallowing customization for applications requiring from ±1.5g to ±6.0granges. Sensor bandwidth is user-definable. Interrupts can be generatedfor acceleration on any axis above a threshold value (Motion Interrupt)or for acceleration on all three axes below a threshold value(Free-fall Interrupt).\tThe sensor element functions onthe principle of differential capacitance. Acceleration causesdisplacement of a silicon structure resulting in a change incapacitance. An ASIC, using a standard CMOS manufacturing process,detects and transforms changes in capacitance into an analog outputvoltage, which is proportional to acceleration. This voltage isdigitized by an on-board A\/D converter and is accessed via aninter-integrated circuit (I2C) bus or serial peripheral interface (SPI).