KEYENCE 基恩士 SI-F80R 光学三角测量位置传感器
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SI-F80R
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KEYENCE 基恩士
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KEYENCE 基恩士
产品介绍
SI-F Series Spectral Interference Displacement MeterThe SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the smallest defects or changes in position. The fiber type sensor heads are as small as 2mm in diameter and generate no heat and are not influenced by electromagnetic noise for maximum flexibility. Common Applications:• Wafer Thickness• Glass Thickness• Surface Mapping• Stage Positioning• Precision Roller Runout• Warpage\/Flatness
SI-F80R 光学三角测量位置传感器技术参数
| 规格项 | 参数值 | 勾选搜索替代 |
| 性 能 | ||
| 测量范围 | 3.15 to 3.19 inch (80.01 to 81.03 mm) | |
| 特 性 | ||
| 光源 | LED | |
| 接收器 | Other Receiver | |
| 采样频率 | 5 kHz | |
| 扫描区域 | Point or 1-Dimentional | |
| 输出 | Voltage; Current; Switched / Alarm | |
| 连 接 & 显 示 | ||
| 接口 | Serial; Parallel | |
| 环 境 | ||
| 工作温度 | 32 to 122 F (0.0 to 50 C) | |
| 更多技术信息 | ||
| 激光安全 | Class 1/1M | |
| 更多规格 | ||
| 产品类别 | Optical Triangulation Position Sensors |
产品替代
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