小程序
传感搜
传感圈

Brooks Instrument 布鲁克斯 GF100 & GF101 & GF120 & GF120XSL & GF120XSD & GF121 流量控制器

分享
  • 后询价或查看价格

  • GF100 & GF101 & GF120 & GF120XSL & GF120XSD & GF121

  • 流量控制器

  • Brooks Instrument 布鲁克斯

  • 请咨询供应商

  • Brooks Instrument 布鲁克斯

联系销售
专家支持

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.","The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.","Features","Benefits","Applications

特性

  • Long-term zero stability of <±0.5% full scale per year
  • 稳定时间:700毫秒-<1秒
  • 满标度流速高达300 slpm
  • All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • 本地显示器
  • 可选sds气体输送
  • devicenettm, rs-485 l协议和模拟接口
  • 高性能元件的可靠性测试达到了半导体行业标准的七倍
  • 全金属耐腐蚀流道,表面积减小,体积不受冲刷,确保在清洗步骤中更快干燥
  • With MultiFloTM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
  • 高度可配置的平台,使大多数品牌的金属密封mfcs,包括前celerity, mykrolis, tylan和单位品牌的dropin更换和升级
  • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
  • 方便的用户显示和独立的诊断/维修端口有助于设备的安装、监控和故障排除
  • 半导体蚀刻工具
  • 薄膜化学气相沉积系统(CVD、MOCVD、PECVD、ALD)
  • 物理气相沉积(pvd)系统
  • 外延工艺系统
  • 建立时间:700ms - <1秒
  • DeviceNetTM、RS-485 L协议和模拟接口
  • 方便的用户显示和独立的诊断/服务端口辅助设备的安装、监控和故障排除
  • 物理气相沉积(pvd)系统
  • 外延过程系统

GF100 & GF101 & GF120 & GF120XSL & GF120XSD & GF121 流量控制器技术参数

点击查看 0 个替代产品
规格项 参数值 勾选搜索替代
性 能
精度 0.3 ±% FS
特 性
测量介质 Gas
控制信号输出 Analog Voltage; Serial / Digital; Network / Fieldbus Output; RS485, DeviceNet™
控制输出数量 1 outputs
输入数量 1 inputs
连 接 & 显 示
用户接口 Computer Programmable
更多规格
产品类别 Flow Controllers
通信接口 RS485, DeviceNet™
标准和合规性 RoHS; Other; EC Directive 2004/108/EC, CE: EN61326-1: 2006, REACH Directive EC 1907/2006

产品替代

找到 个替代产品

流量传感器交流圈

约10圈友等你加入

    加载中···

    专家支持

    0 / 300

    选择图片

    确定提交

    提交成功

    系统自动将您的问题推送给专家解答

    查看专家解答
    请扫码进入传感圈小程序

    如何查看专家解答您的问题?

    1
    2
    3
    4